MicroGen/X-FAB Completes Piezo-MEMS Vibration Energy Harvester Process Transfer

MicroGen Systems, Inc. announced that X-FAB MEMS Foundry in Itzehoe, Germany has completed the process transfer of its MicroElectroMechanical Systems (MEMS) based piezoelectric platform process onto 200 mm silicon substrates in record time. MicroGen’s first piezo-MEMS product-line is a vibration energy harvester or micro-power generator (MPG) with 100 and 120 Hz, and custom resonant frequency response. The MPG is a small (volume ~1.0 cm3 or less; on the order of the size of a green pea) wafer-level packaged device. MicroGen’s MPGs are low cost, long lifetime (estimated > 20 years) devices that scavenge otherwise wasted ambient vibrational energy will replace or extend the lifetime of batteries in wireless sensor and other microelectronic applications.

X-FAB’s CEO, Rudi De Winter commented, “This has been a very good relation, and X-FAB is pleased to be participating in what we believe is a new green technology that will have a sizable market in the coming years.” X-FAB MEMS Foundry’s General Manager, Peter Merz also said, “Our belief is that, with the background X-FAB MEMS Foundry and its close partnership with the Fraunhofer Institute for process development, and our growing depth of experience in commercial production efforts, we bring a potent and nimble solution to companies like MicroGen. We are pleased to be a partner with MicroGen.”

MicroGen’s CEO, Dr. Robert Andosca stated, “I am very pleased with the X-FAB MEMS Foundry’s capabilities and know-how.” He further affirmed, “Time to market is of utmost importance with any new product. Without the expertise and dedication of the X-FAB team we could not be heading into pre-production in such a timely manner.”

Dr. Andosca added “MicroGen plans to announce the BOLT™ product-line with power management electronics and optional energy storage modules in the summer this year.”