Advanced Energy Industries Inc. (AEI, Fort Collins, CO) unveiled its Pinnacle™ 3000 dc power supply, which delivers an output of up to 3kW from an input of up to 400Vac and is designed specifically for both sputtering and bias applications.
The half-rack device has a line current of 5A and exhibits an efficiency >90 percent at full-power output. Other features include fast, reconfigurable arc response; Profibus and RS-232 serial communication interfaces; non-volatile memory storage; and over-current protection.
