Cascade Microtech Announces the Tesla Power Semiconductor Device Characterization System
Cascade Microtech announced its new Tesla power device characterization system. Tesla is said to solve the on-wafer probing challenges for engineers and test technicians who need to characterize their power devices by way of what is claimed to be the industry’s first power device measurement system providing a complete on-wafer solution for over- temperature, low contact resistance measurements of power semiconductors up to 60A and 3000V.
Cascade’s Tesla system features two new wafer probes, including a high current probe that reduces the potential for probe and device destruction during testing. The probe can support an unprecedented 10A of current in continuous mode and up to 60A of current in pulsed mode. To reduce device heating, the probe tip is designed to minimize contact resistance at the wafer-to-probe interface.
The Tesla system also features a high voltage probe that ensures a high performance electrical measurement path at high voltages. The high voltage probe provides the capability to make coaxial measurements up to 3000V and triaxial measurements up to 1100V. In addition, both the high current and the high voltage probes feature a replaceable tip that is easily changed. The Tesla system’s wafer chuck provides state-of-the-art handling for thin wafers. An exclusive chuck top technology provides the right amount of vacuum in a delicate method that protects against wafer breakage and probe damage, all while ensuring a minimal contact resistance.
Other safety features of the Tesla system include the highly insulated and electrically shielded cable assemblies that provide both triaxial performance and high current/high voltage handling capabilities. To ensure operator safety, ease of set-up and configuration, Tesla offers a safety interlock system and remote system operation. The measurement environment and every component in the measurement path is designed and tested by Cascade Microtech to comply with voltages up to 3000V.
The Tesla system starts at U.S. $200,000. Pricing depends upon user options selected. Delivery is 12 weeks upon receipt of order.