Adept Technology Inc. (San Jose, CA), a manufacturer of flexible automation for the semiconductor, electronics, fiber optic, telecommunications and life sciences industries, introduced the new Adept Film-Frame Handler platform for back-end metrology and advanced packaging process equipment. The system is designed to provide high film-frame capacity and fast swap times to maximize utilization of any type of film-frame process equipment. The system supports both 200mm and 300mm wafer film frames and can handle up to 50 film frames in a single load.
The Adept Film-Frame Handler system is based on Adept SmartModules linear mechanisms and the Adept SmartServo distributed motion control architecture. It is designed for SEMI S2/S8, and includes integrated sensing for cassette presence, cassette size and height. It also has two independently interlocked load ports. Available design options include SMEMA compliance, compatibility with overhead transfer and personal-guided vehicle mechanisms.