Kyma Adds Substrates to its Gallium Oxide (β-Ga2O3) Product Line

March 13, 2018 by Paul Shepard

Kyma Technologies, Inc. has launched a crystalline beta-phase gallium oxide (β-Ga2O3) substrate product line. Kyma’s β-Ga2O3 Substrates are produced by slicing {010} oriented bulk crystals, then lapping and polishing through a CMP process to create an epi-ready {010} oriented substrate.

This new offering was made possible by Kyma’s successful and ongoing collaboration with Northrop-Grumman SYNOPTICS which has developed a β-Ga2O3 boule growth process with support from Air Force Research Laboratory (AFRL).

Crystalline beta gallium oxide (ß-Ga2O3) is a promising wide bandgap semiconductor (WBGS) material due in part to its large bandgap of 4.8- to 4.9-eV, its high breakdown field of 8 MV/cm, and its high dielectric constant of 10, and good electron mobilities, which translate to a high-voltage Baliga figure of merit (HV-BFOM) that is more than 3000 times greater than that of Si, more than 8 times greater than that of 4H-SiC, and more than 4 times greater than that of GaN.

Also, its high frequency Baliga figure of merit (HF-BFOM) is about 150 times that of Si, about 3 times that of 4H-SiC, and 50% greater than that of GaN. Kyma's Ga2O3 substrates are fabricated from high-quality bulk ß-Ga2O3 crystals.

Kyma’s president & CEO, Dr. Keith Evans, commented, “It’s been great to observe the rapid progress made by SYNOPTICS in this exciting new materials system. We have greatly enjoyed collaborating with them and we are very pleased to have the opportunity to apply Kyma’s crystal fabrication capabilities to their β-Ga2O3 crystals to create this important new product offering.”

SYNOPTICS’ general manager, Dr. Kevin Stevens, added, “We are pleased to work with Kyma. They have helped us better understand the potential of our materials and the nuances of substrate fabrication, and they are closely connected with the semiconductor research community which is the current target customer base.”

This new product offering represents the latest addition to Kyma’s related products and services connected with the β-Ga2O3 materials system, which also includes β-Ga2O3 Epi wafers and β-Ga2O3 Wafer Fabrication Services.